Equipment database

Search by location
or process

• Search database •

Contact - Delft

Kavli Nanolab Delft
Frank Dirne


TNO Delft
Jochem Janssen


Else Kooi Laboratory
Casper Juffermans





EKL logo

TNO is the national organization for applied scientific research with 2,900 employees and a annual turnover of 518 million euros. Its mission is to apply scientific knowledge with the aim of strengthening the innovative power of industry and government.


High-end metrology and inspection, particle and molecular contamination control, sub 20 nm flexible patterning, Integrated Nanophotonics, advanced material control and analysis.

Expert technologies

  • Contamination control
  • (EUV) Optics Lifetime
  • Nanofabrication for quantum computing 

More information

For more information, please contact
Jochem Janssen,  Program manager, or visit the TNO website.

Visiting address

TNO Technical Sciences
Stieltjesweg 1
2628 CK Delft

banner apply for free use of facilities

News & Agenda Delft

Date: 2018-04-10

Location: Delft

Symposium on Direct Write, Optical, Ion and Electron Beam Lithography >>>