Equipment database

Search by location
tool/instrument
or process

• Search database •

Contact - Delft

Kavli Nanolab Delft
Frank Dirne

Contact


TNO Delft
Jochem Janssen

Contact


Else Kooi Laboratory
Casper Juffermans

Contact

 

TUDelft-Logo

TNO-Logo

EKL logo

TNO is the national organization for applied scientific research with 2,900 employees and a annual turnover of 518 million euros. Its mission is to apply scientific knowledge with the aim of strengthening the innovative power of industry and government.

Themes

High-end metrology and inspection, particle and molecular contamination control, sub 20 nm flexible patterning, Integrated Nanophotonics, advanced material control and analysis.

Expert technologies

  • Contamination control
  • (EUV) Optics Lifetime
  • Nanofabrication for quantum computing 

More information

For more information, please contact
Jochem Janssen,  Program manager, or visit the TNO website.

Visiting address

TNO Technical Sciences
Stieltjesweg 1
2628 CK Delft

banner apply for free use of facilities

News & Agenda Delft

Date: 2018-04-10

Location: Delft

Symposium on Direct Write, Optical, Ion and Electron Beam Lithography >>>

Date: 2016-12-08

Location: Delft

Nieuwe extreem UV licht faciliteit EBL-2 van TNO ziet 'first light' >>>

Date: 2016-07-12

Location: Delft

TNO building a new EUV beamline >>>

Date: 2014-03-14

Location: Delft

Kavli Nanolab recently ordered a new, second Electron Beam Lithography machine >>>