Equipment database

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Equipment database NanoLabNL

Are you looking for a specific tool for lithography, thermal processing or deposition? Or do you already have a specific tool in mind and looking for a Nano Lab NL-location where you can find that tool?

Please use our equipment database to find what you are looking for. Search by:

Tool name
Main purpose
Main characteristics
id Tool name Location Process Sub-process Function Specimen
1 XRD Philips (Diffractometer) MESA+ NanoLab Twente Characterisation XRD Crystallografic measurements; thin film thicknesses
2 Zinc Oxide sputtercoater Balzers (Lionix) MESA+ NanoLab Twente Film formation Sputtering Reactive Sputtering Zn Up to 100 mm

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