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Equipment database NanoLabNL

Are you looking for a specific tool for lithography, thermal processing or deposition? Or do you already have a specific tool in mind and looking for a Nano Lab NL-location where you can find that tool?

Please use our equipment database to find what you are looking for. Search by:

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id Tool name Location Process Sub-process Function Specimen
1 Hydrofobic_Tester_Microscope EKL Nanolab Delft Inspection / Metrology
2 ICP etcher (Chlorine) Kavli Nanolab Delft Etching DRIE systems High rate aluminium etching, magn. material etching Max. 4 inch (100 mm) wafer, small pieces allowed.
3 ICP PE Chemical Vapour Deposition NanoLab@TU/e Eindhoven Film formation PECVD Deposition of SiNx and SiOx Wafer(like) substrates with a maximum diameter of 8 inch
4 Implanter Quantum 684 Philips Innovation Services Ion beam technology Ion implantation Max. 8 inch diameter
5 Inductively Coupled Plasma (ICP) etcher NanoLab@TU/e Eindhoven Etching RIE systems Etching of optical devices. III-V semiconductor substrates, maximum size 2 inch.
6 InfraRed bake oven MESA+ NanoLab Twente Lithography Baking Polymer baking Small samples up to 100 mm
7 Infrared_Setup_for_Inspection_after_Bonding EKL Nanolab Delft Inspection / Metrology Optical Microscopy
8 InP Reactive Ion Etcher (RIE) NanoLab@TU/e Eindhoven Etching RIE systems Etching of InP-InGaAsP-InGaAs Maximum size 2 inch. Mask material allowed : nitride, oxide, Ti, resist baked at temperatures of 200 degrees or higher.
9 Insitu AFM MESA+ NanoLab Twente Inspection / Metrology AFM Surface inspection Small samples up to 100 mm
10 Ion Beam Etching NanoLab@TU/e Eindhoven Ion beam technology Ar ion beam etching Substractive method to transfer patterns by Ar ion beam etching (Non selective) Maximum wafer size 4 inch. Note: homogeneity 10% over 3 cm.
11 Ion Beam Etser Philips Innovation Services Etching IBE 6 inch
12 Ion implanter IBS MESA+ NanoLab Twente Ion beam technology Ion implantation Implantation of materials with high energy ions Single wafer 100 mm
13 Jeol JSM 7000F Scanning Electron Microscope Zernike Nanolab Groningen Inspection / Metrology SEM Surface inspection Max.4 inch diameter
14 Jeol JSM 7000F Scanning Electron Microscope Zernike Nanolab Groningen Inspection / Metrology SEM Surface inspection Max.4 inch diameter
15 JEOL JSM-6360 Scanning Electron Microscope Kavli Nanolab Delft Inspection / Metrology SEM Specimen surface inspection Max. 4 inch in diameter
16 Jeol SEM Prober IMS MESA+ NanoLab Twente Inspection / Metrology SEM Surface imaging Small samples up to 100 mm
17 Jetfirst RTA, rapid thermal anealer Zernike Nanolab Groningen Thermal processing RTP Heating Max. 3 inch diameter
18 Jetfirst RTA, rapid thermal anealer Zernike Nanolab Groningen Thermal processing RTP Heating Max. 3 inch diameter
19 Kameleon AMOLF NanoLab Amsterdam Evaporation Deposition
20 KJL sputtering tool Zernike Nanolab Groningen Film formation Sputtering Coating Max 3 inch diameter

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