Equipment database

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Equipment database NanoLabNL

Are you looking for a specific tool for lithography, thermal processing or deposition? Or do you already have a specific tool in mind and looking for a Nano Lab NL-location where you can find that tool?

Please use our equipment database to find what you are looking for. Search by:

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Location
Process
Sub-process
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Main characteristics
 
id Tool name Location Process Sub-process Function Specimen
1 EVG 150 Resist track Philips Innovation Services Lithography Spin coating Max. 6 inch diameter
2 EVG620EVG-Deep-UV Mask Aligner Zernike Nanolab Groningen Lithography Optical Lithography The EVG-620 Mask Aligner can work with 5 and 6 inch masks
3 EVG620EVG-Deep-UV Mask Aligner Zernike Nanolab Groningen Lithography Optical Lithography The EVG-620 Mask Aligner can work with 5 and 6 inch masks
4 EVG_101_Spraycoater EKL Nanolab Delft Lithography Spin coating
5 EVG_120_Coater_Developer EKL Nanolab Delft Lithography Spin coating
6 EVG_420_Contact_Aligner EKL Nanolab Delft Lithography baking
7 FEI Helios AMOLF NanoLab Amsterdam Ion beam technology Dual beam Pattering and fabricating structures at the nano- or microscale with the FIBand analyze them with the SEM. up to wafer 100 mm
8 FEI Quanta AMOLF NanoLab Amsterdam Inspection / Metrology CL Surface inspection small samples
9 FEI XL30 AMOLF NanoLab Amsterdam electron mater light interaction CL Surface inspection
10 Fiber pull installation own design MESA+ NanoLab Twente Miscellaneous Choose a subprocess… Pulling glass fibers
11 Field Emission Scanning Electron Microscope Kavli Nanolab Delft Inspection / Metrology SEM Specimen surface inspection / High resolution imaging Max. 4 inch in diameter
12 Filmetrics MESA+ NanoLab Twente Lithography Optical Thin film measurement Single wafer 100 mm
13 First Nano CNT Kavli Nanolab Delft Film formation CVD CVD thin film growth max. 50mm diameter
14 Flexus F-5200 stress meter Philips Innovation Services Characterisation Stress curvature Max. 8 inch diameter
15 Flip chip bonder MESA+ NanoLab Twente Miscillaneous Bonding Surface bonding Small samples up to 100 mm
16 Fluorescence Activated Cell Scanner Kavli Nanolab Delft Inspection / Metrology Optical Microscopy Fluorescence Activated Cell Scanning Hard plastic FACS tube
17 Fluorescence Activated Cell Sorter Vantage SE Kavli Nanolab Delft Inspection / Metrology Optical Microscopy Fluorescence Activated Cell Sorting Soft plastic FACS tube
18 Freeze_Dry_equipment_MEMS EKL Nanolab Delft miscellaneous
19 Fusion_DUV_cure EKL Nanolab Delft lithography Optical

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