Equipment database

Search by location
tool/instrument
or process

• Search database •

NanolabNL

Tool specifications

Database
  • AlX2000 Multi Wafer System (7wafers)
  • Philips Innovation Services
  • Film formation
  • MOVPE
  • Aixtron
  • InP material (InP, InGAs, InGaAsP, AlGaInAs); GaAs material (GaAs, AlGaAs, AlInGaP, GaAsP)
  • 2, 3 and 4 inch


banner apply for free use of facilities