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Tool specifications

Database
  • AlX200RF Single Wafer System (2x)
  • Philips Innovation Services
  • Film formation
  • MOVPE
  • Aixtron
  • InP material (InP, InGAs, InGaAsP, AlGaInAs); GaAs material (GaAs, AlGaAs, AlInGaP, GaAsP); GaN material (GaN, (AlIN)GaN/Al2O3, (AlIn)GaN/SiC)
  • max 2 inch


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