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Tool specifications

Database
  • AME 5000
  • Philips Innovation Services
  • Etching
  • RIE systems
  • Applied Materials Etching
  • 2 chambers; F-based (CF4, CHF3, O2, Ar, and N2) & Cl-based (Cl2, HBr, CF4, O2, and Ar)
  • 6 inch


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