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NanolabNL

Tool specifications

Database
  • Aluminium sputtercoater Oxford 400
  • MESA+ NanoLab Twente
  • Film formation
  • Sputtering
  • Oxford
  • Sputtering of metal layers
  • Sputtering Ti/W and Al/Si
  • DC sputtering proces
  • Loadlock system
  • 1-8 wafers per run (100mm)


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