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Kavli Institute of Nanoscience

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TNO Delft

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TNO NanoLab Delft

TNO is the national organization for applied scientific research with 4,500 employees and a annual turnover of 600 million euros. Its mission is to apply scientific knowledge with the aim of strengthening the innovative power of industry and government.

Themes

High-end metrology and inspection, particle and molecular contamination control, sub 20 nm flexible patterning, Integrated Nanophotonics, advanced material control and analysis

Expert techniques

Contamination analysis and plasma cleaning, nano-lthography & beaminduced deposition, ultra-high precision metrology stage platform.

More information
For more information, please contact Kemo Agovic or visit the TNO website.

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