Kavli NanoLab Delft
Kavli Nanolab Delft is a research facility that concentrates the nanoscience activities in Delft, in particular the ones from the Department of Quantum Nanoscience and the Department of Bionanoscience which together form the Kavli Institute of Nanoscience Delft.
It was established in a long history connected to nanoscale research in the group of Mooij and co-workers, all members of the Kavli Institute of Nanoscience Delft. An important aspect of the working philosophy is that cutting-edge research is performed by postdocs, MSc and PhD students.
The Kavli Nanolab Delft is part of the Van Leeuwenhoek Laboratory (VLL); one of the largest nanotechnology research facilities in Europe.
The Kavli Nanolab Delft provides technological infrastructure for the fabrication and inspection of functional nanostructures. The facility specializes in high-resolution charged particle-beam lithography down to sub-10 nm details and materials structuring using advanced reactive plasmas.
Technical specifications
- 6000 m2 lab space and offices
- 3000 m2 modular cleanroom areas (ISO-class 5 or better)
- Compliant with the latest cleanroom standards
- Vibration-free segments and segments with EM shielding available
State-of-the-art equipment
- Lithography (electron and ion beam, optical)
- Wet chemical processing
- Thin-film deposition (evaporation, sputtering, atomic layer deposition, PECVD)
- Dry etching (RIE, ICP)
- Inspection (such as SEM, HIM, TEM, SPM techniques, optical microscopy)
- High-precision optics manufacturing and qualification
A list of equipment at Kavli NanoLab Delft can be found here.
Themes
Nano- and molecular electronics, technology for nanophotonics and spintronics, multi-purpose cleanroom nanofacility
Expert techniques
High-resolution electron-beam lithography, advanced reactive plasma processing.
More information
For more information, please contact Emile van der Drift or visit the website of Kavli NanoLab Delft.