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Database
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NanolabNL
Tool specifications
Database
id
date
2011-08-25
Tool name
Cluster ovenstack Tempress
Apparatus
Location
MESA+ NanoLab Twente
Process
Thermal processing
Sub-process
Tube furnace
Supplier
Tempress
Website supplier
http://www.tempress.nl/
Function
Deposition of thin layers
Main purpose
Main characteristics
(Extra) facilities
Specimen
1-25 wafers per run (100mm)
Contactform
Contact
MESA+ NanoLab Twente
