NanolabNL Clustersystem (3 reactors) own design

id

date

2011-08-25

Tool name

Clustersystem (3 reactors) own design

Apparatus

Location

MESA+ NanoLab Twente

Process

Film formation

Sub-process

ALD

Supplier

Own design

Website supplier

http://www.utwente.nl/mesaplus/

Function

Atomic layer growth

Main purpose

Deposition of atomic layers; wide variaty of materials

Main characteristics

Three reaction chambers; one ICP source

(Extra) facilities

Loadlock system; in situ measurements with ellipsometer

Specimen

Single wafer 100 mm

Contactform

NanolabNL