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Database NanoLabNL

Are you looking for a specific tool for lithography, thermal processing or deposition? Or do you already have a specific tool in mind and looking for a Nano Lab NL-location where you can find that tool?

Please use our database to find what you are looking for. You can search by:

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Tool name
Location
Process
Sub-process
Main purpose
Main characteristics

id Tool name Location Process Sub-process Function Specimen
1 4 point measurement probe own design MESA+ NanoLab Twente Characterisation 4-point probing Resistivity measurement Up to 100 mm
2 AFM Veeco MESA+ NanoLab Twente Inspection/Metrology AFM Surface inspection Small samples up to 100 mm
3 AFM-STM MESA+ NanoLab Twente Inspection/Metrology AFM Surface inspection Small samples up to 100 mm
4 Aluminium sputtercoater Oxford 400 MESA+ NanoLab Twente Film formation Sputtering Sputtering of metal layers 1-8 wafers per run (100mm)
5 Analytical TEM FEI Instruments MESA+ NanoLab Twente Characterisation TEM
6 Anodic bonder EVG MESA+ NanoLab Twente Miscellaneous Anodic bonding Bonding wafers Double wafer 100 mm
7 Bond inspection camera MESA+ NanoLab Twente Inspection/Metrology Optical Microscopy Surface inspection Small samples up to 100 mm
8 Carbon Evaporator Polaron MESA+ NanoLab Twente Film formation Evaporation Evaporation of carbon Up to 100 mm
9 Cluster ovenstack Tempress MESA+ NanoLab Twente Thermal processing Tube furnace Deposition of thin layers 1-25 wafers per run (100mm)
10 Clustersystem (3 reactors) own design MESA+ NanoLab Twente Film formation ALD Atomic layer growth Single wafer 100 mm
 
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