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Equipment database NanoLabNL

Are you looking for a specific tool for lithography, thermal processing or deposition? Or do you already have a specific tool in mind and looking for a Nano Lab NL-location where you can find that tool?

Please use our equipment database to find what you are looking for. Search by:

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Tool name
Location
Process
Sub-process
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Main characteristics
 
id Tool name Location Process Sub-process Function Specimen
1 4 point measurement probe own design MESA+ NanoLab Twente Characterisation 4-point probing Resistivity measurement Up to 100 mm
2 4-point prober Kavli Nanolab Delft Characterisation 4-point probing Measure sheet resistance of thin films 100 mm teflon chuck
3 7120 exposure equipment Philips Innovation Services Lithography Optical Max. 8 inch diameter
4 Adixen_AMS100 EKL Nanolab Delft etching DRIE systems
5 AFM AMOLF NanoLab Amsterdam Inspection / Metrology AFM Surface inspection up to wafer 100 mm
6 AFM Veeco MESA+ NanoLab Twente Inspection / Metrology AFM Surface inspection Small samples up to 100 mm
7 AFM-STM MESA+ NanoLab Twente Inspection / Metrology AFM Surface inspection Small samples up to 100 mm
8 AIT_4_point_probe_CR10000 EKL Nanolab Delft Characterisation 4-point probing
9 Aixtron_Black_Magic EKL Nanolab Delft Film formation cvd
10 AKT Philips Innovation Services Film formation PECVD Max. 8 inch diameter
11 Alcatel_GIR300_F_Cl_etcher_MEMS EKL Nanolab Delft etching RIE systems
12 Alcatel_GIR300_F_etcher EKL Nanolab Delft etching RIE systems
13 ALD Zernike Nanolab Groningen Film formation Evaporation Thin film processing
14 ALD Philips Innovation Services Film formation PECVD 6 inch
15 Aluminium sputtercoater Oxford 400 MESA+ NanoLab Twente Film formation Sputtering Sputtering of metal layers 1-8 wafers per run (100mm)
16 AlX2000 Multi Wafer System (7wafers) Philips Innovation Services Film formation MOVPE 2, 3 and 4 inch
17 AlX200RF Single Wafer System (2x) Philips Innovation Services Film formation MOVPE max 2 inch
18 AME 5000 Philips Innovation Services Etching RIE systems 6 inch
19 AML_Bonder EKL Nanolab Delft Miscellaneous
20 Analytical TEM FEI Instruments MESA+ NanoLab Twente Characterisation TEM

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