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NanoLabNL possesses basic and expert technologies

Each of our four locations offer a range of basic and expert technologies. The basic technologies provide a general infrastructure suitable for common nanofabrication activities with a low geographical threshold. The expert technologies provide unique facilities and/or expertise unlikely to be found anywhere else in the country.

The expert technologies of the NanoLabNL-locations are:

Kavli NanoLab Delft

- Nanostructuring by charged particle beams
- Fabrication of quantum devices
- Bionano imaging and superresolution microscopy

TNO NanoLab Delft

- Vacuum cleaning technologies
- Ultraclean handling and particle detection
- Specialized metrology


- Deposition of organic, magnetic and semiconductor nanostructured material
- Processing of III-V-based integrated nanophotonic devices
- Advanced nanoscale processing

Zernike NanoLab Groningen

- Soft molecular landing deposition
- Ultra high vacuum low temperature scanning tunneling microscopy of surfaces
- High resolution photo electron spectroscopy for elemental surface characterization

MESA+ NanoLab Twente

- Surface level research and modifications
- Analysis and high resolution nanoimaging
- Device development for bionano and health applications

Philips Innovation Services

- Deposition, lithography, etching, measurement, substrates of any shape up to 200 mm
- SCIL (Substrate conformal imprint lithography), e-beam lithography, double-sided processing lithography, Piezo MEMS, optical coatings, circuits on flexible substrates
- Device integration, large area microstructuring by laser ablation, microfluidics, bio-cartridges, lab-on-a-chip, LEDs and OLEDs, thin-film encapsulation
- Thin film characterization, trace analysis and contamination control, RF DC device characterization

Please contact our representatives to discuss the possibilities for your project.

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News & Agenda

Date: 2017-08-25

Location: NanoLabNL

'Help the Netherlands to keep its leading position in nanotechnology' >>>

Date: 2017-06-07

Location: Twente

3-day course Pulsed Laser Deposition >>>

Date: 2017-05-08

Location: NanoLabNL

European symposium ENRIS 2017 >>>

Date: 2017-04-20

Location: Eindhoven

Short course Atomic Layer Deposition >>>

Date: 2017-04-07

Location: Groningen

Conference Fysica 2017 in Groningen >>>

Date: 2016-12-08

Location: Delft

Nieuwe extreem UV licht faciliteit EBL-2 van TNO ziet 'first light' >>>

Date: 2016-11-09

Location: Eindhoven

Grand opening NanoAccess Lab TU/e >>>

Date: 2016-10-28

Location: NanoLabNL

Free use of NanoLabNL facilities for industrial parties >>>