Basic and expert techniques

Each of the NanoLabNL locations offers a range of basic and expert techniques. The basic techniques provide a general infrastructure suitable for common nanofabrication activities with a geographical barrier as low as possible. The expert techniques are unique facilities and/or expertise you aren't likely to find anywhere else in the country.

The expert techniques of the NanoLabNL-locations are:

Kavli NanoLab Delft

High-resolution electron-beam lithography, advanced reactive plasma processing.

TNO NanoLab Delft

Contamination analysis and plasma cleaning, nano-lthography & beaminduced deposition, ultra-high precision metrology stage platform.

NanoLab@TU/e

Deposition of organic, magnetic and semiconductor nano structured materials, processing of III-V semiconductor devices

Zernike NanoLab Groningen

Soft Molecular Landing deposition

MESA+ NanoLab Twente

Nano-imprint lithography, thin film growth complex materials, ion beam etching, wide spectrum of analysis

Philips Innovation Services

• Deposition, lithography, etching, measurement, substrates of any shape up to 200 mm
• SCIL (Substrate conformal imprint lithography), e-beam lithography, double-sided processing lithography, Piezo MEMS, optical coatings, circuits on flexible substrates
• Device integration, large area microstructuring by laser ablation, microfluidics, bio-cartridges, lab-on-a-chip, LEDs and OLEDs, thin-film encapsulation
• Thin film characterization, trace analysis and contamination control, RF & DC device characterization

Please contact our representatives to discuss the possibilities for your project.