Equipment database

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tool/instrument
or process

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NanoLabNL Are you new to Atomic Layer Deposition technology ? Be sure to attend the 1-day course ALD on 20 April @TUeindhoven https://t.co/6F5M7GgLYD
NanoLabNL RT @IATurkije: Today last photonics meeting, this time about microspheres @kocuniversity microphotonics research group @photondelta @IAnetw
NanoLabNL RT @albertvdbergtwt: Overzicht van grootschalige onderzoeksfaciliteiten in NL, met hierin ook Nanolab NL @UTwente https://t.co/gDs2AfDJXi

Are you looking for a specific tool for, for example, lithography, thermal processing or deposition? Or do you already have a specific tool in mind and are you looking for a NanoLabNL-location where you can find that tool?

Please use the NanoLabNL database to find the tool that you are looking for. You can search by:

  • Location
  • Process
  • Sub-process 

NanoLabNL facility use
1. initial consultation is free
2. advice, discussion of process, process flow development
3. use of facilities
· independent use of cleanroom after training
· hiring in cleanroom expertise (contract research)
· independent use of facilities with assistance from experienced technicians

Can't find what you are looking for? Please contact This email address is being protected from spambots. You need JavaScript enabled to view it., head programme office NanoLabNL (STW),  or one of our representatives on location.

NanoLabNL possesses basic and expert technologies

Each of our four locations offer a range of basic and expert technologies. The basic technologies provide a general infrastructure suitable for common nanofabrication activities with a low geographical threshold. The expert technologies provide unique facilities and/or expertise unlikely to be found anywhere else in the country.

The expert technologies of the NanoLabNL-locations are:


Kavli NanoLab Delft

- Nanostructuring by charged particle beams
- Fabrication of quantum devices
- Bionano imaging and superresolution microscopy

TNO NanoLab Delft

- Vacuum cleaning technologies
- Ultraclean handling and particle detection
- Specialized metrology

NanoLab@TU/e

- Deposition of organic, magnetic and semiconductor nanostructured material
- Processing of III-V-based integrated nanophotonic devices
- Advanced nanoscale processing

Zernike NanoLab Groningen

- Soft molecular landing deposition
- Ultra high vacuum low temperature scanning tunneling microscopy of surfaces
- High resolution photo electron spectroscopy for elemental surface characterization

MESA+ NanoLab Twente

- Surface level research and modifications
- Analysis and high resolution nanoimaging
- Device development for bionano and health applications

Philips Innovation Services

- Deposition, lithography, etching, measurement, substrates of any shape up to 200 mm
- SCIL (Substrate conformal imprint lithography), e-beam lithography, double-sided processing lithography, Piezo MEMS, optical coatings, circuits on flexible substrates
- Device integration, large area microstructuring by laser ablation, microfluidics, bio-cartridges, lab-on-a-chip, LEDs and OLEDs, thin-film encapsulation
- Thin film characterization, trace analysis and contamination control, RF DC device characterization
 

Please contact our representatives to discuss the possibilities for your project.

Access to our facilities is arranged via NanoLabNL representatives of the participating institutions. You can find their contact information on our Contact page.

- Access to the NanoLabNL facilities is provided according to all 3 different access modes as defined in the European Charter for Access to Research Infrastructures. -

Two categories of NanoLabNL users are distinguished:

  1. Public research communities
  2. Private parties and other users

In case of waiting times for NanoLabNL equipment, priorities are determined according to the following rules:

  • Users from all categories have equal rights for access to facilities or equipment.
  • In case of capacity limits the local head of NanoLabNL for a given institution will decide. In this case users from category 1  will get access first.
  • Regulations with respect to facility use are strictly according to the local procedures (e.g. for intake, reservation of equipment, etc. ) at a given institution. Users are obliged to strictly follow the indications from the local facility responsible or deputy. Violation in this context may result in the user no longer being allowed access to the facility.

The NanolabNL parties nor the corresponding institutions will accept any responsibility for damage, directly or indirectly related to using the NanoLabNL facilities at the given institution.

We distinguish two rates* related to NanoLabNL facility use:

  • Public rate: Users from public research communities in the Netherlands**
    e.g. FOM, STW, NWO, CW, Universities, Research institutes, etc.
  • Private rate: Other users, private parties.

     Pricing level for 2016-2017***

Cost item (per person)

Public user (€)

Private user (€)

Variable costs/day

installations, materials

656

656

Variable costs/day

technology, personnel

0

295

Fixed costs/day

depreciation installations and equipment  

0

441

Tariff NanoLabNL per day

656

1392

Tariff NanoLabNL per hour

82

174

* These rates apply to the use of the facilities of the 5 official partners of NanoLabNL and do not apply to the use of the facilities of associated partner Philips Innovation Services.

** Please note that the costs for use by researchers in the own institutions costs are paid according to the financial arrangements at that particular institution, with the public rate as the upper limit.

 

*** Different rates may apply for certain equipment.

 

banner apply for free use of facilities

News & Agenda

Date: 2017-06-07

Location: Twente

3-day course Pulsed Laser Deposition >>>

Date: 2017-05-08

Location: NanoLabNL

European symposium ENRIS 2017 >>>

Date: 2017-04-20

Location: Eindhoven

Short course Atomic Layer Deposition >>>

Date: 2017-04-07

Location: Groningen

Conference Fysica 2017 in Groningen >>>

Date: 2016-12-08

Location: Delft

Nieuwe extreem UV licht faciliteit EBL-2 van TNO ziet 'first light' >>>

Date: 2016-11-09

Location: Eindhoven

Grand opening NanoAccess Lab TU/e >>>

Date: 2016-10-28

Location: NanoLabNL

Free use of NanoLabNL facilities for industrial parties >>>

Date: 2016-09-30

Location: Twente

Scale-up facility for microfluidic systems >>>